Coating Introduction:
Name: Oxide coating, DLC, TiN, etc.
Performance:
Oxide coating: Excellent ion etching resistance, used for protection of scaleboard in semiconductor processing.
DLC: DLC coating can provide dark black apperance, and also increase the wear and corrosion resistance of products.
TiN: In some semiconductor manufacturing processes, further epitaxial layers need to be established on certain substrates in order to facilitate the fabrication of devices.TiN coating has the following characteristics:
1) Intact coating: TiN coating completely covers the entire base, protecting it from the corrosive environment.
2) High adhesion strength: TiN coating has a high adhesion strength with the base, which offers good thermal cycle stability during operation process.
3) Good chemical stability: TiN coating has good chemical stability to avoid failure in high temperature and corrosive atmospheres.