Best choice for cost-effectiveness！
MS+PECVD
Length4900*Width1800*Height2950
|
>10 years of market validation |
2~4μm |
Automated operation |
Efficient |
|
Utilized PECVD technology(maintenance-free, low cost) |
PECVD technology can achievehigh ionization rate |
Fast deposition rate( >1μm/h) |
High efficiency3~4batches/day |
|
Thickness2-4μm |
| Properties | DLC1500MAX |
| Coating Technology | MS+PECVD |
| Coating Type | Cr/WC/a-C:H |
| Etching | SET |
| Cathodes (number) | 4 |
| Equipment Size(mm) | Length4900*Length1800*Height2950 |
| Volume(m³) | 2 |
| Effective Coating Area(mm) | Φ900*1000 |
| Coating Deposition Temperature(℃) | <200 |
| Capacity (number of trees) | made-to-order |
| Max. Loading Weigh (KG) | 1000 |
| Shaft Diameter (mm) | Maximum diameterΦ350 |
| Processing time (h) | 6-8 |
