TLC1500 equipment uses an anode layer ion source to effectively dissociate the process gas, with magnetron sputtering technology, low temperature deposition of DLC, CrN, WC, W-DLC and other anti-wear and friction reduction coatings, which is suitable for coating various types of molds, parts and so on.
Two magnetron cathodes
Two sets of anode layer ion sources deposited DLC
Φ710*900mm
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Magnetron sputtering+ anode layer lon source |
Hydrogen containing DLC coating |
Deposition temperatures can be as low as 100℃ |
High hardness and wear resistance
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The anode layer ion sourceis used to ionize the carbon-containing gasand deposit the a-C:H coating |
The deposition temperature is low, the lowest is 100°CCand the substrate is wide |
Smooth surface, does not change the product roughness |
The branchus elegans has high hardness and low frictioncoefficient |
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DLC, CrN, WC, W-DLC and other coatingscan be deposited |
| Properties | TLC1500 |
| Coating material | a-C:H |
| Thickness | 2~4μm |
| Hardness | >2000HV |
| Binding force | Higher than HF2 |
| Coefficient of dry friction | <0.1 |
| Service temperature | <300C |
| Deposition temperature | <200C |
| Color | Black |
